Kofloc Low-Cost Metal Sealed Mass Flow Controller /Meter Model 5400

Kofloc Low-Cost Metal Sealed Mass Flow Controller /Meter Model 5400

The Model 5400 Series is a successor to the Model 3440, with enhanced basic capabilities. The appearance is similar to the conventional MFC. The sensor drive system is improved : the zero-drift is further reduced and the response in the lower range is improved . The Model 5410 Series is a mass flow meter with the same body design as that of the 5400 series.

Features :

• Control and response in each setting range are improved. • The following capability to the set voltage is improved (supporting ramping specifications). • As the valve is improved, the control resolution in each range is improved.

Standard Spesifications :

1. Flow range (N2 equivalent,20℃/1 atm)

5400 : 10 SCCM–20 SLM (freely selectable)

5410 : 10 SCCM–20SLM(freely selectable)

2. Sensor

5400 : Thermal mass flow sensor

3. Valve type

5400 : Proportional solenoid valve (closed when not energized) 5410 : –

4. Control range

5400 : 2–100% (F.S.) 5410 : –

5. Response

5400 : 1 sec. or less (0–100% within ±2% typical) 5410 : –

6. Accuracy

5400 : ±1% F.S. (20℃)

7. Repeatability : Within ±0.2% F.S. (20℃)

8. Operating differential pressure

5400 : F.S. ≤ 5 SLM: 50–300 kPa 5410 : –

F.S.> 5 SLM: 100–300 kPa –

9. Allowable operating pressure

5400 : 300 kPa (G) or less

10. Proof pressure : 980 kPa (G)

11. Leak rate : 1 × 10-11 Pa•m3/s or less

12. Allowable ambient temperature : 0–50℃ (Accuracy guaranteed at 15–35℃, ±0.1% F.S./℃)

13. Allowable ambient humidity : 10–90% (No condensation allowed)

14. Materials of parts in contact with gases :

– Body: SUS316L

– Diaphragm: Ni-Co

– Valve seat: PTFE

– Sealing: SUS316L, Ni

15. Electric connection :

Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)

16. Flow rate input signals :

5400 : 0–5 VDC (Input impedance: 1 MΩ or more)　 5410 : –

17. Flow rate output signals : 0–5 VDC (Minimum load resistance: 250 kΩ or more)

18. Required power supply :

5400 : +15 VDC (±5%) 100 mA, 5410 : +15 VDC (±5%) 100 mA,

−15VDC (±5%) 200mA −15VDC (±5%) 100mA

19. Joint (Main unit bore) : Standard: 1/4 VCR equivalent Option: 1/4 SWL

20. Weight

5400 : Approx. 1000 g 5410 : Approx. 800 g

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