Kofloc Low-Cost Metal Sealed Mass Flow Controller /Meter Model 5400
Kofloc Low-Cost Metal Sealed Mass Flow Controller /Meter Model 5400
The Model 5400 Series is a successor to the Model 3440, with enhanced basic capabilities. The appearance is similar to the conventional MFC. The sensor drive system is improved : the zero-drift is further reduced and the response in the lower range is improved . The Model 5410 Series is a mass flow meter with the same body design as that of the 5400 series.
Features :
• Control and response in each setting range are improved. • The following capability to the set voltage is improved (supporting ramping specifications). • As the valve is improved, the control resolution in each range is improved.
Standard Spesifications :
1. Flow range (N2 equivalent,20℃/1 atm)
5400 : 10 SCCM–20 SLM (freely selectable)
5410 : 10 SCCM–20SLM(freely selectable)
2. Sensor
5400 : Thermal mass flow sensor
3. Valve type
5400 : Proportional solenoid valve (closed when not energized) 5410 : –
4. Control range
5400 : 2–100% (F.S.) 5410 : –
5. Response
5400 : 1 sec. or less (0–100% within ±2% typical) 5410 : –
6. Accuracy
5400 : ±1% F.S. (20℃)
7. Repeatability : Within ±0.2% F.S. (20℃)
8. Operating differential pressure
5400 : F.S. ≤ 5 SLM: 50–300 kPa 5410 : –
F.S.> 5 SLM: 100–300 kPa –
9. Allowable operating pressure
5400 : 300 kPa (G) or less
10. Proof pressure : 980 kPa (G)
11. Leak rate : 1 × 10-11 Pa•m3/s or less
12. Allowable ambient temperature : 0–50℃ (Accuracy guaranteed at 15–35℃, ±0.1% F.S./℃)
13. Allowable ambient humidity : 10–90% (No condensation allowed)
14. Materials of parts in contact with gases :
– Body: SUS316L
– Diaphragm: Ni-Co
– Valve seat: PTFE
– Sealing: SUS316L, Ni
15. Electric connection :
Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)
16. Flow rate input signals :
5400 : 0–5 VDC (Input impedance: 1 MΩ or more) 5410 : –
17. Flow rate output signals : 0–5 VDC (Minimum load resistance: 250 kΩ or more)
18. Required power supply :
5400 : +15 VDC (±5%) 100 mA, 5410 : +15 VDC (±5%) 100 mA,
−15VDC (±5%) 200mA −15VDC (±5%) 100mA
19. Joint (Main unit bore) : Standard: 1/4 VCR equivalent Option: 1/4 SWL
20. Weight
5400 : Approx. 1000 g 5410 : Approx. 800 g
flow meter, water meter, ultrasonic, electromagnetic, variable area, vortex, steam, air, water, udara, limbah, solar, oil, level sensor, air motor, hydraulic, pneumatic, pressure switch, flow sensor, connector, plug, receptacle, flow transmitter, portable, clamp on, wall mount, hand held, high pressure, gauge, battery, sensor, reflex, seal, cylinder, solenoid, regulator, valve, shaft, piston, clutch, brake
