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Thermal Mass Gas Flow Meter

Siargo specializes MEMS flow sensing technology and manufactures MEMS flow sensors, modules, and system products that are shipped worldwide. Our global technical team is working 24/7 and ready to provide timely solutions to your even very special requirements.

Our patented low power and integrated flow system technology and know-how excel in many applications for flow measurements. We are committed to meet our customers needs and offer the value-added features at a very competitive cost. Achieved by our proprietary MEMS integration and package technology, the sensors can measure gas flow in a pipe diameter from 0.5 mm up to 2 m and with a flow speed from 5 mm/sec up to 75 m/sec without sacrificing measurement accuracy.

Our products have been deployed to utility gas metering, automotive applications, medical gas sensing, food and pharmaceutical industry gas management, environmental and analytical instrumentation, to name just a few.

Innovation continuously leads the product technology

Quality precisely ensures the product performance

Service timely provides the product technical supports

The MEMS flow sensors bear a number of merits compared to the traditional thermal mass flow sensors. It is because not only the sensor manufacture process ensures a Thigh degree of consistency among each individual sensor, but also the process allows integration of additional features that could significantly enhance the functionality and extend the application scopes.

MEMS mass flow sensors have become one of the choices for flow measurement since 1980s. Up to date, the applications are however applicable to clean gases with a limited measurable flow speed. Since its inception in the earlier 2004, Siargo has been dedicated to develop state of-the-art MEMS mass flow sensors as well as its package technology aiming to enhance the product performance, functions as well as reliability. Our sensors focus on the innovative integrations and product performance that enables various applications in many challenging circumstances.

Our flow sensing products feature :

Integrated multiple mass flow sensors with extended dynamic rangeability

Ultra low power consumption

High sensitivity at low flow regime

Innovative package technology that provides self-flow conditioning

Standard and user friendly interfaces

Low pressure loss

Easy and ready for networking

User friendly installation

Ex ia IIC T4 / Ex d IIB T4 and up to IP66 rating