Kofloc Standard Mass Flow Meter MODEL 3760 SERIES

Standard Mass Flow Meter MODEL 3760 SERIES

The Model 3760 Series is a compact, low-cost mass flow meter developed based on the Model 3660 Series. It has been developed as a standard model of various analyzers and vacuum equipment for research and development at universities and research institutes.

Features :

• Improved constant-current temperature difference detection type flow sensor for quick response • The compact body permits installation at any location.

Standard Spesifications:

1. Flow range (N2 equivalent, 20℃/1atm)

3760 : 10 SCCM–20 SLM (freely selectable)

3765 : 30 SLM–100 SLM (freely selectable)

2. Sensor : Thermal mass flow sensor

3. Response

3760 : 2 sec. or less

3765 : 3 sec. or less

4. Accuracy

3760 : ±1.0%F.S. (25℃)

3765 : ±1.5%F.S. (25℃)

5. Temperature coefficient

3760 : ±0.1 F.S./℃ (15–35℃)

3765 : ±0.2 F.S./℃ (15–35℃)

6. Repeatability : ±0.5%F.S. (20℃)

7. Proof pressure : 980kPa (G)

8. Leak rate : 1 × 10-8 Pa•m3/s or less (excluding permeation of He)

9. Allowable ambient temperature : 5–45℃

10. Allowable ambient humidity : 10–90% (No condensation allowed)

11. Materials of parts in contact with gases : Body: SUS316

Sealing: FKM (option: CR or NBR)

12. Electric connection : Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)

13. Flow rate output signals : 0–5 VDC (External load resistance: 250 kΩ or more)

14. Required power supply : +15VDC (±5%) 100mA, −15VDC (±5%)100mA

15. Joint (Main unit bore)

3760 : Standard: 1/4SWL

Option: 1/8SWL 1/4VCR RC1/4, etc.

3765 : Standard: 3/8SWL

Option: 1/2SWL 3/8VCR RC3/8, etc.

16. Weight

3760 : Approx. 800 g

3765 : Approx. 1000 g