Compact Handy Mass Flow Control/Measurement Unit
This is a compact handy flow control/measuring unit made by combining a compact DIN72 x72 power indicator [CR-400] and MFC/MFM.
・ Compact, lightweight integral unit
・ The touch panel type permits easy FS scaling, flow setting, and valve opening/closing.
・ Free selection of joints ranging from one-touch type to Swage-lock.
・ The MFC-equipped type (FCC Series) can be used as MFM by pressing the OPEN switch.
・ Please contact us for the metal seal specifications for corrosive gas.
Standard Spesification :
1. Mounting MFC/MFM
FCC-3000-G1 : 3660 (MFC)
FCC-3000-G2 : 3200 (MFC)
FCM-3000-G1 : 3760 (MFM)
FCM-3000-G2 : 3100 (MFM)
2. Standard flow range (at N2 calibration condition)
FCC-3000-G1 : 10SCCM-20SLM
FCC-3000-G2 : 1SCCM-20SLM
FCM-3000-G1 : 10SCCM-20SLM
FCM-3000-G2 : 1SCCM-20SLM
3. Sealing material : FKM (option CR or NBR)
FCC-3000-G1 : Within 2 sec. (F.S. ±2%)
FCC-3000-G2 : Within 1 sec. (F.S. ±2%)
FCM-3000-G1 : Within 1 sec.
FCM-3000-G2 : Within 2 sec.
5. Joint : Various joints are applicable.
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