（*1）　The gases must be dry and clean, free of corrosive components and foreign matter such as dust and mist. 
（*2）　The flow rate calibration units SCCM and SLM indicate a mass flow rate converted to a volume flow rate in cc/min and L/min at 0°C and 1 atm.
（*3）　Accuracy for calibration gas: N2, flow range (max. full scale). 
（*4）　The operating differential pressure may differ depending on specifications. 
（*5）　Mass flow meter does not contain magnetic stainless steel. 
（*6）　Contact us for any other joints. 
（*7）　Exclusive of weight of joint. 
（*8）　Pressure condition would be needed when you order.