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*1 The gases must be dry and clean, free of corrosive components and foreign matter such as dust and mist.
*2 Dedicated software is available to change gases or change the actual full scale (F.S.) within the range of 30 to 100% (30 to 80% for CO2 only) of the
specified full scale.
*3 The flow rate calibration units SCCM and SLM indicate a mass flow rate converted to a volume flow rate in cc/min and L/min at 0°C and 1 atm.
*4 Guarantee for calibration gas: N2.
*5 Accuracy for calibration gas: N2, flow range (max. full scale).
*6 The operating differential pressure may differ depending on specifications.
*7 Contact us for any other joints.
*8 Exclusive of weight of joint.

Mass Flowmeter Type Digital Mass Flow Controller DF-200C SERIES

  • Features
    ・High accuracy(±1%RD),Fast response(1 all range)
    ・Multiple ranges and multiple gases supported
    ・Communications functions installed as standard feature(RS485)
    ・RoHS/CE Standard compliant

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