*1） The gases must be dry and clean, free of corrosive components and foreign matter such as dust and mist.
（*2） The flow rate calibration units SCCM and SLM indicate a mass flow rate converted to a volume flow rate in cc/min and L/min at 0°C and 1 atm.
（*3） The operating differential pressure may differ depending on specifications.
（*4） Pressure condition would be needed when you order.
Mass Flowmeter Type All Metal Digital MFC / MFM MODEL EX-550 SERIES
- Metal sealing design
- Lower cost but high accuracy measurement.
- High speed response and zero stability.
- 0-5VDC or 4-20mA input/output signal and +/-15VDC or 24VDC power supply.
- Mediocrity D-sub 9pin.
- Gases registered in EX-550 are usable by rotary-switch.
- Calculate the flow rate with conversion factor based on N2 gas.
- RoHS compliance, CE marked.